THICKNESS MEASUREMENT UNIT (TMU)

Equipment Details: 

Make : Taylor Hobson

Model : Talysurf CLI 2000

 

Metrology Specification:



Measurement Type

Used Gauge

contact measurement

Inductive gauge with Diamond tip

non-contact large range measurement

Laser gauge

 

Scanning Range:





Used gauge

Large Range

Middle Range

Small Range

Inductive Gauge

1.7mm – 42nm

490um – 7.8nm

103um – 1.6nm

Vertical resolution of Inductive gauge

40nm

10nm

2nm

Accuracy Inductive Gauge

0.3um

50nm

10nm

Laser Gauge

Single Range (9.9mm – 166nm)

Vertical resolution of Laser gauge

1um

Accuracy Laser Gauge

The accuracy is equal to the resolution on diffusing surfaces with homogeneous optical properties.

Minimum spacing

X: 0.5um; Y: 0.5um; Z: 0.5um.

Max spacing

X: 200mm; Y: 200mm; Z: As defined by the range of the gauge.

Max. Measurement speed(X,Y axis)

30000um/s (= 30mm/s)

 

Sample Specification:



Sample dimensions

200mm X 200mm X 200mm

Sample Weight

Max. 15kgs

Sample phase

Solids.

 

Equipment Photo: 
Applications: 

Thickness measurement unit is a useful tool in industrial as well as research leevel samples. It can be used for surface profiling, thickness measurement of coatings and deposits , roughness parameter and similar surface evaluation parameters. Depending upon the sample properties and the dimensions of the coatings appropriate gauge can be chosen.

Contact Person: 

Dr G J Phatak (Instrument in charge) Office No: 020-25989273 ext 206

Email id: gjp@cmet.gov.in.

II). Characterization Incharge, Office no 020-25989273

 

Location: 
Pune Laboratory
Working Principles: 

Working principle of Inductive Gauge:

Inductive gauge will work on the based on the CONTACT MEASURMENT principle, means inductive gauge consists of tracing a surface with a tactile gauge equipped with a diamond stylus tip. When the sample is traced, the up and down movements of the stylus arm result in a change in the inductance of the electrical circuit . The analysis of these variations allows the calculation of the height movements along the Z-axis covered by the stylus arm.

Working principle of the Laser gauge:

Laser gauge will work on the NON-CONTACT LARGE RANGE MEASURMENT principle. The technique used for the triangulation gauge deduces the height of a surface point by sensing the position of a laser spot in the surface using a detector placed at a certain angle away from the incoming laser beam.